发明授权
US5260562A High-resolution light microscope using coherent light reflected from a
target to modulate the power output from a laser
失效
高分辨率光学显微镜使用从目标反射的相干光来调制激光器的功率输出
- 专利标题： High-resolution light microscope using coherent light reflected from a target to modulate the power output from a laser
- 专利标题（中）： 高分辨率光学显微镜使用从目标反射的相干光来调制激光器的功率输出
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申请号： US675794申请日： 1991-03-24
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公开(公告)号： US5260562A公开(公告)日： 1993-11-09
- 发明人: Alan J. Bearden , Michael P. O'Neill
- 申请人： Alan J. Bearden , Michael P. O'Neill
- 申请人地址： CA Berkeley
- 专利权人： Regents of the University of California
- 当前专利权人： Regents of the University of California
- 当前专利权人地址： CA Berkeley
- 主分类号： G01B11/30
- IPC分类号： G01B11/30 ; G02B21/00 ; H01J3/14 ; G11B7/00
摘要：
An optical microscope for examining surface features of a target surface, at a resolution, in one dimension, in the picometer-to-nanometer range. The microscope includes a laser for use in producing a coherent output light beam, a lens for focusing the output beam onto a target, and a photodetector for measuring the power output of the beam. The focused beam is moved relative to the target surface in a defined position-dependent pattern, with a portion of the light reflected from the target surface being reflected back into the laser. Changes in the measured power of the laser are converted to position-dependent surface displacements, in the direction of the output beam.
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