发明授权
- 专利标题： Linear thermal evaporator for vacuum vapor depositing apparatus
- 专利标题（中）： 用于真空气相沉积设备的线性热蒸发器
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申请号： US928970申请日： 1992-08-11
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公开(公告)号： US5216742A公开(公告)日： 1993-06-01
- 发明人: Thomas Krug , Friedrich Anderle , Albert Feuerstein , Eggo Sichmann , Wolfgang Buschbeck
- 申请人： Thomas Krug , Friedrich Anderle , Albert Feuerstein , Eggo Sichmann , Wolfgang Buschbeck
- 申请人地址： DEX Hanau I
- 专利权人： Leybold Aktiengesellschaft
- 当前专利权人： Leybold Aktiengesellschaft
- 当前专利权人地址： DEX Hanau I
- 优先权： DEX4204938 19920219
- 主分类号： C23C14/24
- IPC分类号： C23C14/24
摘要：
A crucible (9) of a nonmetallic material with an elongated cavity (42) to contain the material to be evaporated has on top a vapor emission slot (45) which is defined at its longitudinal edges (43, 44) by two elongated plates (40, 41) of a likewise nonmetallic material. In the cavity (42) two heating rods (46, 47) are disposed in a mirror-symmetrical relationship to a plane of symmetry (S) through the vapor emission slot (45), one under each of the plates (40, 41) defining the vapor emission slot (45). Additional heating means are provided outside of the crucible and inside of a thermal barrier system.
公开/授权文献
- US5820228A Magnet valve block for a vehicle brake system 公开/授权日：1998-10-13
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