发明授权
US5186745A TEOS based spin-on-glass and processes for making and using the same
失效
基于TEOS的旋转玻璃及其制造和使用的方法
- 专利标题： TEOS based spin-on-glass and processes for making and using the same
- 专利标题（中）： 基于TEOS的旋转玻璃及其制造和使用的方法
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申请号： US650119申请日： 1991-02-04
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公开(公告)号： US5186745A公开(公告)日： 1993-02-16
- 发明人: Papu D. Maniar
- 申请人： Papu D. Maniar
- 申请人地址： IL Schaumburg
- 专利权人： Motorola, Inc.
- 当前专利权人： Motorola, Inc.
- 当前专利权人地址： IL Schaumburg
- 主分类号： H01L21/312
- IPC分类号： H01L21/312 ; H01L21/316 ; H01L23/31 ; H01L23/532
摘要：
In on form, a TEOS based spin-on-glass is made having on the order of 10% to 25% by volume of tetraethylorthosilicate, the equivalent of on the order of 0.1% to 3.0% by volume of 70% concentrated nitric acid, on the order of 60% to 90% by volume of alcohol, and the balance water. The spin-on-glass is applied to a semiconductor substrate and heated in order to densify the spin-on-glass.
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