A silica glass filter comprises a porous support body composed of amorphous silica particles as a porous sintered body and having a purity of 99.9% or more and containing 150 ppm or less in total of impurities including alkali, alkali metal, heavy metal and/or elements of III B group, and a filtration layer formed on the support body. The filtration layer is composed of amorphous silica particles as a porous sintered body in a fine mode and has substantially the same purity as that of the support body.