发明授权
- 专利标题: Calibrating laser trimming apparatus
- 专利标题(中): 校准激光修整装置
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申请号: US258152申请日: 1988-10-14
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公开(公告)号: US4918284A公开(公告)日: 1990-04-17
- 发明人: John R. Weisz
- 申请人: John R. Weisz
- 申请人地址: MA Somerville
- 专利权人: Teradyne Laser Systems, Inc.
- 当前专利权人: Teradyne Laser Systems, Inc.
- 当前专利权人地址: MA Somerville
- 主分类号: B23K26/00
- IPC分类号: B23K26/00 ; B23K26/04
摘要:
A laser trimming apparatus calibration system including controlling a laser beam positioning mechanism to move a laser beam to a desired nominal laser position, imprinting a mark on a medium to establish an actual laser position, comparing the imprinted mark with the desired nominal position and producing a result indicative of the difference between the actual position and the desired nominal position. The system further including providing an illuminated mark at a desired illuminated mark nominal position, controlling the laser beam positioning mechanism to direct an optical path to the desired illuminated mark position, establishing an actual illuminated mark position by directing light from the desired illuminated mark nominal position along the optical path to the detection device and comparing the actual illuminated mark position with the nominal illuminated mark position.
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