发明授权
- 专利标题： Compliant motion servo
- 专利标题（中）： 符合运动伺服
-
申请号： US193450申请日： 1988-05-12
-
公开(公告)号： US4817848A公开(公告)日： 1989-04-04
- 发明人: John B. Gabaldon
- 申请人： John B. Gabaldon
- 申请人地址： CA Los Angeles
- 专利权人： Hughes Aircraft Company
- 当前专利权人： Hughes Aircraft Company
- 当前专利权人地址： CA Los Angeles
- 主分类号： H01L21/607
- IPC分类号： H01L21/607 ; B23K20/10 ; G05B19/23 ; G05D3/12 ; H01L21/60
摘要：
An automatic ultrasonic wire bonder employs a compliant motion servo (17, 119, 239, 200) on its Z axis drive to maintain a known, constant and steady force applied by the bonding tool (13) to the wire. The tool is resiliently mounted to a carriage (15) that is driven by a force control servo (17, 119, 238, 200). During bonding, the tool is pressed against the wire, and effects of variations in tool tip Z axis position caused by vibration, wire deformation during bonding and other factors of the equipment are minimized by a servo that precisely controls and maintains a fixed position of the carriage relative to the wire to thereby maintain a preselected force between the bonding tool tip and the wire.
公开/授权文献
- US4312507A Portable lighted study or game tray 公开/授权日：1982-01-26
信息查询
IPC分类:
