发明授权
- 专利标题： Positioning apparatus for a circular substrate
- 专利标题（中）： 圆形基板定位装置
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申请号： US803437申请日： 1985-12-02
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公开(公告)号： US4685206A公开(公告)日： 1987-08-11
- 发明人: Jiro Kobayashi , Koichi Yoshikawa
- 申请人： Jiro Kobayashi , Koichi Yoshikawa
- 申请人地址： JPX Tokyo
- 专利权人： Nippon Kogaku K. K.
- 当前专利权人： Nippon Kogaku K. K.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX59-256922 19841205
- 主分类号： H01L21/68
- IPC分类号： H01L21/68 ; B23P19/00 ; G05D3/00 ; H01L21/67 ; H01L21/677
摘要：
A positioning apparatus for positioning a circular substrate having a notch in a circumferential edge includes a notch sensor which senses the rotational position of the substrate about a center axis, a pushing member adapted to fit into the notch and moved toward the center axis to displace the substrate so as to engage positioning elements, and a detector that detects the fitting of the pushing member in the notch, the detector being movable with the pushing member.
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