发明授权
- 专利标题: Bonded grid-cathode electrode structure
- 专利标题(中): 结合栅 - 阴电极结构
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申请号: US307404申请日: 1981-10-01
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公开(公告)号: US4405878A公开(公告)日: 1983-09-20
- 发明人: David W. Oliver
- 申请人: David W. Oliver
- 申请人地址: DC Washington
- 专利权人: The United States of America as represented by the Secretary of the Army
- 当前专利权人: The United States of America as represented by the Secretary of the Army
- 当前专利权人地址: DC Washington
- 主分类号: G03F7/26
- IPC分类号: G03F7/26 ; H01J9/04 ; H01J9/14 ; H01J9/18 ; H01J1/14
摘要:
A variety of technologies have been applied in the development of a bondedrid cathode. Erosion lithography is used for making the fine-detail grid structure, combining air erosion and lithographic techniques. To obtain openings of the order of 0.001 inch (one mil) or smaller, a nozzle with a high aspect ratio exit opening is used, and the cathode grid structure is scanned. A photo resist in which the grid pattern is developed is used over the molybdenum or tungsten grid film. The metal film is removed from the grid openings by chemical etching. The photo resist over the metal grid is used as a composite mask for removing the BN insulation in the openings by erosion with Al.sub.2 O.sub.3 powder from the special nozzle on the air blast gun.
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