发明授权
US4276365A Positive resist terpolymer composition and method of forming resist
pattern
失效
正抗蚀剂三聚物组合物和形成抗蚀剂图案的方法
- 专利标题: Positive resist terpolymer composition and method of forming resist pattern
- 专利标题(中): 正抗蚀剂三聚物组合物和形成抗蚀剂图案的方法
-
申请号: US061291申请日: 1979-07-02
-
公开(公告)号: US4276365A公开(公告)日: 1981-06-30
- 发明人: Yasuhiro Yoneda , Toshisuke Kitakohji , Kenro Kitamura
- 申请人: Yasuhiro Yoneda , Toshisuke Kitakohji , Kenro Kitamura
- 申请人地址: JPX
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JPX
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03C1/68
摘要:
PCT No. PCT/JP78/00022 Sec. 371 Date July 7, 1979 Sec. 102(e) Date July 2, 1979 PCT Filed Nov. 6, 1978 PCT Pub. No. WO79/00284 PCT Pub. Date May 31, 1979A cross-linkable positive-working ionizing radiation-resist or ultraviolet ray- resist polymer composition including: in polymerized form,(a) units derived from a methacrylic acid ester of the formula:CH.sub.2 .dbd.C(CH.sub.3).COOR where R is an alkyl or haloalkyl group having from 1 to 6 carbon atoms, benzyl or cyclohexyl,(b) units derived from a monoolefinically unsaturated carboxylic acid from 3 to 12 carbon atoms and having from 1 to 3 carboxyl groups, and(c) units derived from methacrylic acid chloride.The amount of the units (c) in the polymer composition is such that the number of moles of the units (b), multiplied by the number of the carboxyl group or groups in each of the units (b) ranges from about 1 to about 20% based on the total number of moles of the units (a), (b) and (c); the amount of the units (c) ranges from about 0.05 to about 3.0% by mole based on the total number of moles of the units (a), (b) and (c); and the molar ratio of the units (b), multiplied by the number of the carboxyl groups in each of the units (b), to the units (c) is greater than 2/1 but less than 250/1.
公开/授权文献
- US6063209A Magnetic core and method of manufacturing the same 公开/授权日:2000-05-16
信息查询
IPC分类: