Invention Application
- Patent Title: METHODS FOR PRODUCING A 3D SEMICONDUCTOR MEMORY DEVICE AND STRUCTURE
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Application No.: US17942109Application Date: 2022-09-09
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Publication No.: US20240395592A1Publication Date: 2024-11-28
- Inventor: Zvi Or-Bach , Brian Cronquist , Deepak C. Sekar
- Applicant: Monolithic 3D Inc.
- Applicant Address: US OR Klamath Falls
- Assignee: Monolithic 3D Inc.
- Current Assignee: Monolithic 3D Inc.
- Current Assignee Address: US OR Klamath Falls
- Main IPC: H01L21/683
- IPC: H01L21/683 ; G11C8/16 ; H01L21/74 ; H01L21/762 ; H01L21/768 ; H01L21/822 ; H01L21/8238 ; H01L21/84 ; H01L23/00 ; H01L23/367 ; H01L23/48 ; H01L23/525 ; H01L25/00 ; H01L25/065 ; H01L27/02 ; H01L27/06 ; H01L27/092 ; H01L27/10 ; H01L27/105 ; H01L27/118 ; H01L27/12 ; H01L29/423 ; H01L29/66 ; H01L29/78 ; H01L29/788 ; H01L29/792 ; H10B10/00 ; H10B12/00 ; H10B20/00 ; H10B20/20 ; H10B41/20 ; H10B41/40 ; H10B41/41 ; H10B43/20 ; H10B43/40

Abstract:
A method for producing a 3D memory device including: providing a first level including a first single-crystal layer and control circuits, where the first level includes at least two interconnecting metal layers; forming at least one second level disposed above the first level; performing a first etch step including etching holes within the second level; forming at least one third level above the second level; performing a second etch step including etching holes within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level; each of first memory cells include one first transistor and each of second memory cells include one second transistor, where first memory cells and second memory cells are a NAND nonvolatile type memory, and at least one of the second transistors include a metal gate.
Public/Granted literature
- US12154817B1 Methods for producing a 3D semiconductor memory device and structure Public/Granted day:2024-11-26
Information query
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