Invention Application
- Patent Title: FILM STRUCTURE FOR BOND PAD
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Application No.: US18782099Application Date: 2024-07-24
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Publication No.: US20240387424A1Publication Date: 2024-11-21
- Inventor: Julie Yang , Chii Ming Wu , Tzu-Chung Tsai , Yao-Wen Chang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes an interconnect structure over a substrate. The interconnect structure includes a plurality of interconnects disposed within a dielectric structure. A bond pad structure is over the interconnect structure, a first masking layer is over the bond pad structure, and a second masking layer is over the first masking layer. The second masking layer contacts opposing outermost sidewalls of the bond pad structure and the first masking layer. A conductive bump vertically extends through the first masking layer and the second masking layer to contact the bond pad structure.
Information query
IPC分类: