- 专利标题： PROCESSING APPARATUS SEPARATING MULTILAYER MATERIAL, PROCESSING METHOD, AND METHOD FOR MANUFACTURING ARTICLE USING PROCESSING APPARATUS
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申请号： US18601848申请日： 2024-03-11
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公开(公告)号： US20240308129A1公开(公告)日： 2024-09-19
- 发明人: YUSHI YAMAKAWA
- 申请人： CANON KABUSHIKI KAISHA
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP 23040175 2023.03.14
- 主分类号： B29C59/00
- IPC分类号： B29C59/00 ; B29C59/02 ; B32B43/00 ; H01L21/027
摘要：
A processing apparatus configured to separate a multilayer material in which a curable composition is sandwiched between a first member and a second member facing each other, includes a first holding unit configured to suction and hold a first surface of the multilayer material, a second holding unit configured to suction and hold a second surface facing the first surface of the multilayer material, and a deformation mechanism, wherein at least one of the first holding unit and the second holding unit is configured to suction and hold the multilayer material via a flexible member, and wherein the deformation mechanism is configured to deform at least a portion of the flexible member so as to form a start point of separation in the multilayer material.
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