- 专利标题： HYBRID SHOWERHEAD WITH SEPARATE FACEPLATE FOR HIGH TEMPERATURE PROCESS
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申请号： US18025197申请日： 2021-09-09
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公开(公告)号： US20240295026A1公开(公告)日： 2024-09-05
- 发明人: Lipyeow YAP , Panya WONGSENAKHUM , Nivin VIKRAMAN , Gary B. LIND
- 申请人： LAM RESEARCH CORPORATION
- 申请人地址： US CA Fremont
- 专利权人： LAM RESEARCH CORPORATION
- 当前专利权人： LAM RESEARCH CORPORATION
- 当前专利权人地址： US CA Fremont
- 国际申请： PCT/US2021/049556 2021.09.09
- 进入国家日期： 2023-03-08
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; C23C16/44
摘要：
A showerhead for a processing chamber comprises a metal plate attached to the processing chamber. a ceramic faceplate attached to the metal plate and including a plurality of gas outlets on a substrate-facing surface. and a metal ring surrounding the ceramic faceplate and attached to the processing chamber.
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