MERGED CAVITIES FOR CONDUCTOR FORMATION IN A MEMORY DIE
Abstract:
Methods, systems, and devices for merged cavities for conductor formation in a memory die are described. An array of cavities may be formed through a stack of material layers of a memory die, and conductors may be formed at least in part by merging some of the cavities of the array. Such cavities may be sized in accordance with a relatively smallest feature that implements a subset of such cavities, and a smallest associated feature may be formed using a first subset of the array of cavities. Conductors may be formed at least in part by merging two or more cavities of a second subset of the array of cavities using a material removal operation to remove portions of the stack of material layers. Such merging may support conductors being formed with a cross-section that is greater than a cross-section of other features formed using such cavities that are not merged.
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