A substrate processing device includes: a brush, cleaning a substrate held by a holding and rotating part; a brush holding part, detachably holding the brush; an arm, in which the brush holding part is provided at a tip end; a brush collection part, collecting the brush from the brush holding part; a brush installation part, storing an unused brush, and installing the unused brush that is stored to the brush holding part; and a brush movement mechanism (lifting mechanism and revolving driving part), moving the brush via an arm.