- 专利标题: PROBE SHEET WITH CONTACT TIP ON STACKED MULTI-LAYER AND METHOD OF MANUFACTURING THE SAME
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申请号: US18617675申请日: 2024-03-27
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公开(公告)号: US20240230717A1公开(公告)日: 2024-07-11
- 发明人: Yong Ho CHO , Tae Kyun KIM
- 申请人: Yong Ho CHO , PROTEC MEMS TECHNOLOGY INC
- 申请人地址: KR Yongin-si
- 专利权人: Yong Ho CHO,PROTEC MEMS TECHNOLOGY INC
- 当前专利权人: Yong Ho CHO,PROTEC MEMS TECHNOLOGY INC
- 当前专利权人地址: KR Yongin-si
- 优先权: KR 20220166458 2022.12.02
- 主分类号: G01R1/067
- IPC分类号: G01R1/067 ; C23C14/02 ; C23C14/18 ; C23C14/58 ; C23C28/02 ; C25D3/38 ; C25D7/00 ; G01R1/073
摘要:
Disclosed are a probe sheet with a multi-layer contact tip and a method of manufacturing the same capable of improving the design freedom of a contact tip formed on a probe sheet of a probe card for testing a semiconductor device to come in contact with a pad of the semiconductor device. According to the present invention, the design freedom of a contact tip formed on a probe sheet of a probe card for testing a semiconductor device to come in contact with a pad of the semiconductor device can be improved, and since the shape of a contact surface of a contact tip is maintained the same and contact resistance is maintained in an allowable range even when a protective layer coated on the contact tip to increase durability of the contact tip is worn, test reliability of the probe card can be improved.
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