- 专利标题: End-Point Detection for Backside Metal Thickness Control
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申请号: US18081394申请日: 2022-12-14
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公开(公告)号: US20240203798A1公开(公告)日: 2024-06-20
- 发明人: Florian G. HERRAULT
- 申请人: HRL Laboratories, LLC
- 申请人地址: US CA Malibu
- 专利权人: HRL Laboratories, LLC
- 当前专利权人: HRL Laboratories, LLC
- 当前专利权人地址: US CA Malibu
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; H01L21/48 ; H01L21/683 ; H01L23/538 ; H01L23/544
摘要:
A method of controlling the thickness of a layer of material applied to a surface, where the surface has one or more bodies of another material disposed therein, the another material being significantly harder than the first mentioned material, the one or more bodies of another material being disposed on the surface before the layer of material is applied to the surface, the layer of material when applied to the surface having a sufficient thickness to cover the one or more bodies of the another material, the layer of material then being mechanically reduced in thickness, such as by polishing, to expose at least a portion of the one or more bodies of the another material.
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