- 专利标题: Positive Resist Material And Patterning Process
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申请号: US18380475申请日: 2023-10-16
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公开(公告)号: US20240168379A1公开(公告)日: 2024-05-23
- 发明人: Jun HATAKEYAMA
- 申请人: SHIN-ETSU CHEMICAL CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP 22165990 2022.10.17
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/039
摘要:
The present invention is a positive resist material containing a compound having two or more urethane groups and having two or more carboxy groups that are each substituted with an acid-labile group and are bonded to the urethane groups via a linking group. This provides: a positive resist material that has higher sensitivity and higher resolution than conventional positive resist materials and smaller edge roughness and CDU, and allows excellent pattern profile after exposure to light; and a patterning process.
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