Invention Publication
- Patent Title: MEASUREMENT SYSTEM FOR DETECTING DEEP-HOLE SURFACE TOPOGRAPHY BASED ON LOW-COHERENCE INTERFEROMETRY
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Application No.: US18469792Application Date: 2023-09-19
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Publication No.: US20240167812A1Publication Date: 2024-05-23
- Inventor: Huining ZHAO , Xiaoying HOU , Jie WANG , Liandong YU , Haojie XIA
- Applicant: HEFEI UNIVERSITY OF TECHNOLOGY
- Applicant Address: CN Anhui
- Assignee: HEFEI UNIVERSITY OF TECHNOLOGY
- Current Assignee: HEFEI UNIVERSITY OF TECHNOLOGY
- Current Assignee Address: CN Anhui
- Priority: CN 2211468113.5 2022.11.22
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01B9/0209

Abstract:
A measurement system for detecting deep-hole surface topography based on low-coherence interferometry (LCI), can include a detection part and an autocollimation system. The detection part includes a white light interferometric system, which specifically includes a 1550 nm amplified spontaneous emission (ASE) broadband light source, a first reflector, a first beam splitting prism, a second reflector, and a reference reflector that are arranged in sequence, where a to-be-measured deep-hole and a near-infrared camera are respectively arranged at two sides of the first beam splitting prism, and a conical prism is disposed inside the to-be-measured deep-hole. The autocollimation system is disposed between the to-be-measured deep-hole and the first beam-splitting prism. The autocollimation system includes a 630 nm light source, a dichroic prism, a second beam-splitting prism, a third reflector, and a quadrant detector that are arranged in sequence.
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