A method for singulating a semiconductor substrate into individual semiconductor devices, comprising: providing a semiconductor substrate having a front surface and a back surface, wherein the semiconductor substrate comprises device regions that are separated from each other by respective predetermined saw streets; forming an interconnect layer on the front surface; etching the front surface at the predetermined saw streets to form respective frontside openings each having a first depth, wherein the first depth is smaller than a thickness of the semiconductor substrate; attaching a semiconductor element onto the front surface in each device region; and etching the back surface at the respective predetermined saw streets to form respective backside openings each having a second depth, wherein each frontside opening is at least partially aligned with the backside opening at the same saw street to singulate the device regions of the semiconductor substrate into individual semiconductor devices.