发明公开
- 专利标题: EMBEDDED METAL PADS
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申请号: US17943580申请日: 2022-09-13
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公开(公告)号: US20240088072A1公开(公告)日: 2024-03-14
- 发明人: Tsung Han Chiang , Shin Yueh Yang
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
Methods, apparatuses, and systems related to embedded metal pads are described. An example semiconductor device includes a dielectric material, a metal pad having side surface, where a lower portion of the side surface is embedded in the dielectric material, a mask material on a portion of a surface of the dielectric material, an upper portion of the side surface of the metal pad, and a portion of a top surface of the metal pad and a contact pillar on a second portion of the top surface of metal pad, the contact pillar comprising a metal pillar and a pillar bump.
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