Invention Publication
- Patent Title: INTEGRATED CIRCUIT PACKAGE SUPPORTS
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Application No.: US18502244Application Date: 2023-11-06
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Publication No.: US20240071777A1Publication Date: 2024-02-29
- Inventor: Kristof Kuwawi Darmawikarta , Robert May , Sri Ranga Sai Boyapati , Srinivas V. Pietambaram , Chung Kwang Christopher Tan , Aleksandar Aleksov
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L23/498

Abstract:
Disclosed herein are integrated circuit (IC) package supports and related apparatuses and methods. For example, in some embodiments, a method for forming an IC package support may include forming a first dielectric material having a surface; forming a first conductive via in the first dielectric material, wherein the first conductive via has tapered sidewalls with an angle that is equal to or less than 80 degrees relative to the surface of the first dielectric material; forming a second dielectric material, having a surface, on the first dielectric material; and forming a second conductive via in the second dielectric material, wherein the second conductive via is electrically coupled to the first conductive via, has tapered sidewalls with an angle that is greater than 80 degrees relative to the surface of the second dielectric material, and a maximum diameter between 2 microns and 20 microns.
Public/Granted literature
- US12176223B2 Integrated circuit package supports Public/Granted day:2024-12-24
Information query
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