Invention Publication
- Patent Title: LIQUID CELL FOR ELECTRON MICROSCOPE AND MANUFACTURING METHOD THEREOF
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Application No.: US17956276Application Date: 2022-09-29
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Publication No.: US20240038487A1Publication Date: 2024-02-01
- Inventor: Jiwoong YANG , Jungwon PARK , Hyeonjong MA
- Applicant: DAEGU GYEONGBUK INSTITUTE OF SCIENCE & TECHNOLOGY , SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
- Applicant Address: KR Daegu
- Assignee: DAEGU GYEONGBUK INSTITUTE OF SCIENCE & TECHNOLOGY,SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
- Current Assignee: DAEGU GYEONGBUK INSTITUTE OF SCIENCE & TECHNOLOGY,SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
- Current Assignee Address: KR Daegu; KR Seoul
- Priority: KR 20220093229 2022.07.27
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/05 ; H01J37/20

Abstract:
Provided is a liquid cell for an electron microscope according to an embodiment of the inventive concept, including a lower widow layer, an upper widow layer above the lower widow layer, and a separation film disposed between the upper widow layer and the lower widow layer so as to separate the upper widow layer and the lower widow layer from each other. An upper space may be defined by the upper widow layer and the separation film, and a lower space may be defined by the lower widow layer and the separation film. The upper widow layer, the lower widow layer, and the separation film may include the same material.
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