- 专利标题: CHARGE FILTER MAGNET WITH VARIABLE ACHROMATICITY
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申请号: US17514262申请日: 2021-10-29
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公开(公告)号: US20230139138A1公开(公告)日: 2023-05-04
- 发明人: Wilhelm Platow , Shu Satoh , Neil Bassom
- 申请人: Axcelis Technologies, Inc.
- 申请人地址: US MA Beverly
- 专利权人: Axcelis Technologies, Inc.
- 当前专利权人: Axcelis Technologies, Inc.
- 当前专利权人地址: US MA Beverly
- 主分类号: H01J37/317
- IPC分类号: H01J37/317 ; H01L21/265 ; H01J37/08 ; H05H9/00
摘要:
An ion implantation system has an ion source to generate an ion beam, and a mass analyzer to define a first ion beam having desired ions at a first charge state. A first linear accelerator accelerates the first ion beam to a plurality of first energies. A charge stripper strips electrons from the desired ions defining a second ion beam at a plurality of second charge states. A first dipole magnet spatially disperses and bends the second ion beam at a first angle. A charge defining aperture passes a desired charge state of the second ion beam while blocking a remainder of the plurality of second charge states. A quadrupole apparatus spatially focuses the second ion beam, defining a third ion beam. A second dipole magnet bends the third ion beam at a second angle. A second linear accelerator accelerates the third ion beam. A final energy magnet bends the third ion beam at a third angle, and wherein an energy defining aperture passes only the desired ions at a desired energy and charge state.
公开/授权文献
- US3167316A Phonographs 公开/授权日:1965-01-26
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