- 专利标题: GLASS SUBSTRATES HAVING TRANSVERSE CAPACITORS FOR USE WITH SEMICONDUCTOR PACKAGES AND RELATED METHODS
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申请号: US17485039申请日: 2021-09-24
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公开(公告)号: US20230095846A1公开(公告)日: 2023-03-30
- 发明人: Benjamin T. Duong , Srinivas V. Pietambaram , Aleksandar Aleksov , Helme Castro De La Torre , Kristof Darmawikarta , Darko Grujicic , Sashi S. Kandanur , Suddhasattwa Nad , Rengarajan Shanmugam , Thomas I. Sounart , Marcel A. Wall
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L23/498
- IPC分类号: H01L23/498 ; H01G4/33 ; H01L21/48
摘要:
Glass substrates having transverse capacitors for use with semiconductor packages and related methods are disclosed. An example semiconductor package includes a glass substrate having a through glass via between a first surface and a second surface opposite the first surface. A transverse capacitor is located in the through glass via. The transverse capacitor includes a dielectric material positioned in a first portion of the through glass via, a first barrier/seed layer positioned in a second portion of the through glass via, and a first conductive material positioned in a third portion of the through glass via.
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