发明公开
- 专利标题: MEMORY DEVICES INCLUDING DIFFERENT TIER PITCHES, AND RELATED ELECTRONIC SYSTEMS
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申请号: US18460462申请日: 2023-09-01
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公开(公告)号: US20230413563A1公开(公告)日: 2023-12-21
- 发明人: Yifen Liu , Tecla Ghilardi , George Matamis , Justin D. Shepherdson , Nancy M. Lomeli , Chet E. Carter , Erik R. Byers
- 申请人: Lodestar Licensing Group, LLC
- 申请人地址: US IL Evanston
- 专利权人: Lodestar Licensing Group, LLC
- 当前专利权人: Lodestar Licensing Group, LLC
- 当前专利权人地址: US IL Evanston
- 主分类号: H10B43/27
- IPC分类号: H10B43/27 ; H01L21/768 ; H01L23/528 ; H01L23/532 ; H01L23/522 ; H10B41/27 ; H10B41/35 ; H10B43/35
摘要:
A microelectronic device comprises a first set of tiers, each tier of the first set of tiers comprising alternating levels of a conductive material and an insulative material and having a first tier pitch, a second set of tiers adjacent to the first set of tiers, each tier of the second set of tiers comprising alternating levels of the conductive material and the insulative material and having a second tier pitch less than the first tier pitch, a third set of tiers adjacent to the second set of tiers, each tier of the third set of tiers comprising alternating levels of the conductive material and the insulative material and having a third tier pitch less than the second tier pitch, and a string of memory cells extending through the first set of tiers, the second set of tiers, and the third set of tiers. Related microelectronic devices, electronic systems, and methods are also described.
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