发明公开
- 专利标题: IMPRINT DEVICE, IMPRINT METHOD, ARTICLE MANUFACTURING METHOD, AND STORAGE MEDIUM
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申请号: US18300538申请日: 2023-04-14
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公开(公告)号: US20230390993A1公开(公告)日: 2023-12-07
- 发明人: HIROYUKI MATSUDA
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP 22090048 2022.06.02
- 主分类号: B29C59/02
- IPC分类号: B29C59/02 ; B29C59/00 ; G06V10/22 ; G06V10/145
摘要:
The present invention is to provide an imprint device that can form a circuit pattern with high accuracy even if a deviation occurs in a positional relationship between the circuit pattern and an alignment mark. The imprint device performs an imprinting process in which a mold on which a pattern is formed is brought in contact with an imprint material on a substrate and the pattern is transferred to the substrate at a target position on the substrate, and includes an alignment unit that performs alignment of the mold with the substrate such that the mold and the substrate are at an alignment position corrected based on an amount of relative positional deviation between a pattern mark formed near the pattern of the mold and an alignment mark of the mold obtained by measuring the pattern mark and the alignment mark, and a curing unit that cures the imprint material at the position at which alignment is performed by the alignment unit.
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