- 专利标题: A METHOD FOR MANUFACTURING AN ELECTRICAL DEVICE WITH AN ANODIC POROUS OXIDE REGION DELIMITED BY PLANARIZING A STACK OF MATERIALS
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申请号: US18065188申请日: 2022-12-13
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公开(公告)号: US20230386751A2公开(公告)日: 2023-11-30
- 发明人: Brigitte SOULIER , Frédéric VOIRON , Julien EL SABAHY
- 申请人: Brigitte SOULIER , Frédéric VOIRON , Julien EL SABAHY
- 申请人地址: FR Grenoble
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Nagaokakyo-shi, Kyoto-fu
- 优先权: EP 306755.6 2021.12.13
- 主分类号: H01G4/33
- IPC分类号: H01G4/33 ; H01G4/012 ; C25D11/18 ; C25D11/02
摘要:
A method for manufacturing an electrical device that includes: anodizing a portion of an anodizable metal layer so as to obtain an anodic porous oxide region and an anodizable metal region adjoining the anodic porous oxide region, the anodic porous oxide region being thicker than the anodizable metal region; depositing a layer of liner material on the anodic porous oxide region and on the anodizable metal region; depositing a layer of filler material on the layer of liner material to obtain a stacked structure having a top surface; planarizing the stacked structure from a top surface thereof until reaching the layer of the liner material, so as to expose a portion of liner material located above at least a portion of the anodic porous oxide region; and removing the exposed portion of liner material.
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