The present invention introduces a new shielded gate trench MOSFETs with improved specific on-resistance and avalanche capability structures including an active area and an edge termination area, wherein an epitaxial layer having special multiple stepped epitaxial (MSE) layers in an oxide charge balance (OCB) region, and an edge termination having multiple trench field plates, and electric field reducing regions disposed surrounding bottom of gate trenches with a doping concentration lower than said bottom epitaxial layer of the MSE layers. Moreover, in some preferred embodiment, a multiple stepped oxide structure in the OCB region, and an epitaxial layer in a buffer region below the OCB region with a doping concentration lower than the MSE layers is introduced to further reduce the specific on-resistance and enhance device ruggedness.