发明公开
- 专利标题: HYDROGEN POTENTIAL SENSOR
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申请号: US18036430申请日: 2021-11-10
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公开(公告)号: US20230324330A1公开(公告)日: 2023-10-12
- 发明人: Cesar PASCUAL GARCIA , Damien LENOBLE
- 申请人: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- 申请人地址: LU Eschsur-Alzette
- 专利权人: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- 当前专利权人: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- 当前专利权人地址: LU Eschsur-Alzette
- 优先权: LU 102240 2020.11.25 LU 102245 2020.12.01
- 国际申请: PCT/EP2021/081253 2021.11.10
- 进入国家日期: 2023-05-11
- 主分类号: G01N27/414
- IPC分类号: G01N27/414
摘要:
A pH sensor comprises: a chamber for receiving an electrolyte solution; a first and a second ion-sensitive field effect transistor (ISFETs), each of the first and second ISFETs having a source terminal, a drain terminal and a transistor channel extending between the source terminal and the drain terminal, a dielectric layer with a sensing surface arranged in the chamber so as to be contactable by the electrolyte solution, the dielectric layer separating the sensing surface from the transistor channel; a first measurement circuit configured to measure a first source-drain resistance across the transistor channel of the first ISFET; and a second measurement circuit configured to measure a second source-drain resistance across the transistor channel of the second ISFET. The first and second measurement circuits include a common reference electrode, the reference electrode arranged contactable by the electrolyte solution in the chamber. The dielectric layer of first ISFET has a first thickness and the dielectric layer of the second ISFET has a second thickness different from the first thickness.
公开/授权文献
- US11927562B2 Hydrogen potential sensor 公开/授权日:2024-03-12
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