Disclosed herein a workpiece, a workpiece processing method and a workpiece processing system. To achieve hermetic sealing in a workpiece, it is often desirable to remove contaminants from channels and to seal up the channels. The workpiece processing method comprising applying a low surface energy solution on a surface of the workpiece, the low surface energy solution includes a carrier solvent and a filler material dissolved in the carrier solvent; allowing the low surface energy solution to impregnate into a channel in the workpiece; removing the solvent from the low surface energy solution to remain the filler material in the channel to hermetically seal the channel.