- 专利标题: NITRIDE EPITAXIAL STRUCTURE AND SEMICONDUCTOR DEVICE
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申请号: US18189581申请日: 2023-03-24
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公开(公告)号: US20230290742A1公开(公告)日: 2023-09-14
- 发明人: Zhibin Chen , Ruihong Luo
- 申请人: HUAWEI TECHNOLOGIES CO., LTD.
- 申请人地址: CN Guangdong,Shenzhen
- 专利权人: HUAWEI TECHNOLOGIES CO., LTD.
- 当前专利权人: HUAWEI TECHNOLOGIES CO., LTD.
- 当前专利权人地址: CN Guangdong,Shenzhen
- 优先权: CN 2011025013.6 2020.09.25
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L21/02 ; H01L29/20 ; H01L29/15 ; C30B25/18 ; C30B29/40 ; C30B29/68
摘要:
A nitride epitaxial structure is provided, including: a substrate; a nucleation layer, formed on the substrate, where the nucleation layer is an aluminum nitride layer or a gallium nitride layer; a buffer layer, formed on the nucleation layer, including K stacked group-III nitride double-layer structures, K ≥ 3, each double-layer structure includes an upper layer and a lower layer that are stacked, a band gap difference of each double-layer structure is a difference between a band gap of a material of the upper layer and a band gap of a material of the lower layer, and band gap differences of the K double-layer structures generally present a gradient trend along a thickness direction of the buffer layer; and an epitaxial layer, formed on the buffer layer, where a material of the epitaxial layer includes group-III nitride. A semiconductor device is further provided, including the nitride epitaxial structure.
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