- 专利标题: ACTIVE GAS GENERATION APPARATUS
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申请号: US17790762申请日: 2021-06-25
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公开(公告)号: US20230013017A1公开(公告)日: 2023-01-19
- 发明人: Ren ARITA , Kensuke WATANABE
- 申请人: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- 当前专利权人: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JPPCT/JP2020/045380 20201207
- 国际申请: PCT/JP2021/024082 WO 20210625
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
Provided in an active gas generation apparatus according to the present disclosure is a gas separation structure of separating a gas flow between an in-housing space and a discharge space by a cooling plate, an electrode holding member, and a high voltage apply electrode part. The active gas generation apparatus further includes an auxiliary metal electrode provided on an upper surface of an electrode dielectric film in the high voltage apply electrode part. The auxiliary metal electrode is provided to overlap with part of an active gas transmission path in a plan view, and set to ground potential.
公开/授权文献
- US3166082A Industrial parts washer 公开/授权日:1965-01-19
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