- 专利标题: CHIP PACKAGE STRUCTURE AND METHOD FOR FORMING THE SAME
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申请号: US17370312申请日: 2021-07-08
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公开(公告)号: US20230011353A1公开(公告)日: 2023-01-12
- 发明人: Chin-Hua WANG , Chia Kuei HSU , Shu-Shen YEH , Po-Chen LAI , Po-Yao LIN , Shin-Puu JENG
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L23/498
- IPC分类号: H01L23/498 ; H01L25/065 ; H01L23/00 ; H01L21/48
摘要:
A chip package structure is provided. The chip package structure includes a wiring substrate. The chip package structure includes an interposer substrate over the wiring substrate. The interposer substrate includes a redistribution structure, a dielectric layer, a conductive via, and a plurality of first dummy vias, the dielectric layer is over the redistribution structure, the conductive via and the first dummy vias pass through the dielectric layer, the first dummy vias surround the conductive via, and the first dummy vias are electrically insulated from the wiring substrate. The chip package structure includes a chip structure over the interposer substrate. The chip structure is electrically connected to the conductive via, and the chip structure is electrically insulated from the first dummy vias.
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