- 专利标题: INTEGRATED CIRCUIT COMPONENTS WITH DUMMY STRUCTURES
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申请号: US17700198申请日: 2022-03-21
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公开(公告)号: US20220216149A1公开(公告)日: 2022-07-07
- 发明人: Kevin L. Lin , Nicholas James Harold McKubre , Richard Farrington Vreeland , Sansaptak Dasgupta
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L23/532
摘要:
Disclosed herein are integrated circuit (IC) components with dummy structures, as well as related methods and devices. For example, in some embodiments, an IC component may include a dummy structure in a metallization stack. The dummy structure may include a dummy material having a higher Young's modulus than an interlayer dielectric of the metallization stack.
公开/授权文献
- US11784121B2 Integrated circuit components with dummy structures 公开/授权日:2023-10-10
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