Invention Application
- Patent Title: ELECTROMAGNETIC WAVE SENSOR
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Application No.: US17539976Application Date: 2021-12-01
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Publication No.: US20220178758A1Publication Date: 2022-06-09
- Inventor: Shinji HARA , Naoki OHTA , Susumu AOKI , Eiji KOMURA , Maiko SHIROKAWA
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2020-201817 20201204
- Main IPC: G01J5/20
- IPC: G01J5/20

Abstract:
An electromagnetic wave sensor includes a substrate having transmittance of electromagnetic waves having a specific wavelength, an insulator layer provided on one surface side of the substrate, a thermistor film disposed to have a space between the thermistor film and one surface of the substrate, and a wiring part provided inside or on a surface of the insulator layer and electrically connected to the thermistor film, wherein a transmittance of the electromagnetic waves at a portion facing the thermistor film is relatively higher than a transmittance of the electromagnetic waves at a portion where the wiring part is provided in a layer in which the insulator layer is provided.
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