Invention Application
- Patent Title: Membranes for Removing Metallic Species from Amines
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Application No.: US17488897Application Date: 2021-09-29
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Publication No.: US20220105476A1Publication Date: 2022-04-07
- Inventor: James HAMZIK , Justin BREWSTER , Siddarth SAMPATH , Jad Ali JABER , Aabid A. MIR
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Main IPC: B01D71/26
- IPC: B01D71/26

Abstract:
The disclosure is directed to removal of metal contaminants from fluids, as well as ligand-modified filter materials useful for carrying out such methods. The filters and methods of this disclosure are particularly effective for removal of metals from liquid compositions comprising amines. Such liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist or liquids used in etching. The ligand-modified filters, such as ligand-modified porous membranes, can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system.
Public/Granted literature
- US12059656B2 Membranes for removing metallic species from amines Public/Granted day:2024-08-13
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