- 专利标题: PACKAGE STRUCTURE AND METHOD OF FORMING THE SAME
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申请号: US16924208申请日: 2020-07-09
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公开(公告)号: US20220013422A1公开(公告)日: 2022-01-13
- 发明人: Mao-Yen Chang , Chih-Wei Lin , Hao-Yi Tsai , Kuo-Lung Pan , Chun-Cheng Lin , Tin-Hao Kuo , Yu-Chia Lai , Chih-Hsuan Tai
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsincho
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsincho
- 主分类号: H01L23/31
- IPC分类号: H01L23/31 ; H01L25/065 ; H01L21/56 ; H01L23/00 ; H01L23/40 ; H01L23/538 ; H01L23/498 ; H01L25/00
摘要:
Provided is a package structure including a composite wafer, a plurality of dies, an underfill, and a plurality of dam structures. The composite wafer has a first surface and a second surface opposite to each other. The composite wafer includes a plurality of seal rings dividing the composite wafer into a plurality of packages; and a plurality of through holes respectively disposed between the seal rings and penetrating through the first and second surfaces. The dies are respectively bonded onto the packages at the first surface by a plurality of connectors. The underfill laterally encapsulates the connectors. The dam structures are disposed on the first surface of the composite wafer to separate the underfill from the through holes.
公开/授权文献
- US11322421B2 Package structure and method of forming the same 公开/授权日:2022-05-03
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