- 专利标题: METHOD OF MANUFACTURE OF A STRAIN GAGE OR FLEXIBLE POLYIMIDE-BASED RESISTOR
-
申请号: US17352909申请日: 2021-06-21
-
公开(公告)号: US20210396608A1公开(公告)日: 2021-12-23
- 发明人: Gilad Yaron , Amos Hercowitz , Shirley Manor , Ofir Israeli , Ofir Sudry
- 申请人: VISHAY ADVANCED TECHNOLOGIES, LTD.
- 申请人地址: IL Holon
- 专利权人: VISHAY ADVANCED TECHNOLOGIES, LTD.
- 当前专利权人: VISHAY ADVANCED TECHNOLOGIES, LTD.
- 当前专利权人地址: IL Holon
- 优先权: IL275618 20200623
- 主分类号: G01L1/22
- IPC分类号: G01L1/22 ; H01C10/10
摘要:
A method of manufacture of a strain gage or flexible polyimide-based resistor, the method including the steps of providing a flexible polyimide substrate, joining a conductive foil to the flexible polyimide substrate, applying a layer of photoresist to the conductive foil and thereafter, patterning the conductive foil by etching using the photoresist, wherein the method is characterized in that it includes at least one of the following steps: surface conditioning of the flexible polyimide substrate using mechanical abrasion, scrubbing of the conductive foil prior to the patterning, removal of photoresist by scrubbing following the patterning, pressurized cleaning, using deionized water, following the patterning, automated algorithmic resistance calibration and shunt trimming and forming an emulsion layer of epoxy over the conductive foil following the patterning.
公开/授权文献
信息查询