- 专利标题: MANUFACTURING METHOD OF CHIP PACKAGE AND CHIP PACKAGE
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申请号: US17373773申请日: 2021-07-13
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公开(公告)号: US20210343591A1公开(公告)日: 2021-11-04
- 发明人: Chia-Sheng Lin , Hui-Hsien Wu , Jian-Hong Chen , Tsang-Yu Liu , Kuei-Wei Chen
- 申请人: XINTEC INC.
- 申请人地址: TW Taoyuan City
- 专利权人: XINTEC INC.
- 当前专利权人: XINTEC INC.
- 当前专利权人地址: TW Taoyuan City
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L23/00 ; H01L21/02
摘要:
A manufacturing method of a chip package includes patterning a wafer to form a scribe trench, in which a light-transmissive function layer below the wafer is in the scribe trench, the light-transmissive function layer is between the wafer and a carrier, and a first included angle is formed between an outer wall surface and a surface of the wafer facing the light-transmissive function layer; cutting the light-transmissive function layer and the carrier along the scribe trench to form a chip package that includes a chip, the light-transmissive function layer, and the carrier; and patterning the chip to form an opening, in which the light-transmissive function layer is in the opening, a second included angle is formed between an inner wall surface of the chip and a surface of the chip facing the light-transmissive function layer, and is different from the first included angle.
公开/授权文献
- US11705368B2 Manufacturing method of chip package and chip package 公开/授权日:2023-07-18
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