- 专利标题: LASER ENERGY MEASURING DEVICE, AND LASER ENERGY MEASURING METHOD
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申请号: US17264026申请日: 2019-06-12
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公开(公告)号: US20210310862A1公开(公告)日: 2021-10-07
- 发明人: Michinobu Mizumura
- 申请人: V TECHNOLOGY CO., LTD.
- 申请人地址: JP Yokohama-shi, Kanagawa
- 专利权人: V TECHNOLOGY CO., LTD.
- 当前专利权人: V TECHNOLOGY CO., LTD.
- 当前专利权人地址: JP Yokohama-shi, Kanagawa
- 优先权: JP2018-142967 20180730
- 国际申请: PCT/JP2019/023234 WO 20190612
- 主分类号: G01J1/42
- IPC分类号: G01J1/42 ; G01J4/04 ; G01J1/04
摘要:
A laser energy measuring device with which laser light radiated onto a substrate can be evaluated accurately. The laser energy measuring device includes: inside or outside an illuminating optical system, a first beam splitter which reflects laser light by any one of P-polarized reflection and S-polarized reflection; a second beam splitter which performs the other of P-polarized reflection and S-polarized reflection with respect to first reflected light reflected by the first beam splitter; a first measuring unit which measures energy of second reflected light reflected by the second beam splitter; and a second measuring unit which measures energy of transmitted light that has been transmitted through the second beam splitter.
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