- 专利标题: SENSOR SYSTEM AND METHODS OF MAKING
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申请号: US17330216申请日: 2021-05-25
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公开(公告)号: US20210278364A1公开(公告)日: 2021-09-09
- 发明人: Farhad Khosravi , David Bastable , Sergey A. Dryga
- 申请人: NanoDX, Inc.
- 申请人地址: US MA Southborough
- 专利权人: NanoDX, Inc.
- 当前专利权人: NanoDX, Inc.
- 当前专利权人地址: US MA Southborough
- 主分类号: G01N27/414
- IPC分类号: G01N27/414 ; H01L29/06 ; G01N27/403
摘要:
Sensors having an advantageous design and methods for fabricating such sensors are generally provided. Some sensors described herein comprise pairs of electrodes having radial symmetry, pairs of nested electrodes, and/or nanowires. Some embodiments relate to fabricating electrodes by methods in which nanowires are deposited from a fluid contacted with a substrate in a manner such that it evaporates and is replenished.
公开/授权文献
- US11609198B2 Sensor system and methods of making 公开/授权日:2023-03-21
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