- 专利标题: TWO-DIMENSIONAL CONFORMAL OPTICALLY-FED PHASED ARRAY AND METHODS OF MANUFACTURING THE SAME
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申请号: US17159628申请日: 2021-01-27
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公开(公告)号: US20210232045A1公开(公告)日: 2021-07-29
- 发明人: Shouyuan Shi , Dennis Prather , Peng Yao , Janusz MURAKOWSKI
- 申请人: Phase Sensitive Innovations, Inc.
- 申请人地址: US DE Newark
- 专利权人: Phase Sensitive Innovations, Inc.
- 当前专利权人: Phase Sensitive Innovations, Inc.
- 当前专利权人地址: US DE Newark
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; H01Q21/06 ; G03F7/16 ; H01Q3/26
摘要:
This disclosure is directed to two-dimensional conformal optically-fed phased arrays and methods for manufacturing the same. The method includes providing a wafer substrate, depositing a first cladding layer on the wafer substrate, and depositing a core layer on the first cladding layer. The method further includes photolithographically patterning the core layer to provide a plurality of optical waveguide cores, and depositing a second cladding layer on the core layer to cover the plurality of optical waveguide cores to provide a plurality of optical waveguides. In addition, the method includes forming a plurality of antennas on the second cladding layer, each antenna of the plurality of antennas located near a termination of a corresponding optical waveguide of the plurality of optical waveguides, and providing a plurality of photodiodes on the second cladding layer, each photodiode of the plurality of photodiodes connected to a corresponding antenna.
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