- 专利标题: CONTROL GATE STRUCTURES FOR FIELD-EFFECT TRANSISTORS
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申请号: US16685205申请日: 2019-11-15
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公开(公告)号: US20210151573A1公开(公告)日: 2021-05-20
- 发明人: Haitao Liu , Chandra Mouli
- 申请人: MICRON TECHNOLOGY, INC.
- 申请人地址: US ID BOISE
- 专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人地址: US ID BOISE
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/763 ; G11C16/04
摘要:
Field-effect transistors, and apparatus including such field-effect transistors, including a gate dielectric overlying a semiconductor and a control gate overlying the gate dielectric. The control gate might include an instance of a first polycrystalline silicon-containing material containing polycrystalline silicon, and an instance of a second polycrystalline silicon-containing material containing polycrystalline silicon-germanium or polycrystalline silicon-germanium-carbon.
公开/授权文献
- US11121223B2 Control gate structures for field-effect transistors 公开/授权日:2021-09-14
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