Invention Application
- Patent Title: 3D MICROSCOPE INCLUDING INSERTABLE COMPONENTS TO PROVIDE MULTIPLE IMAGING AND MEASUREMENT CAPABILITIES
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Application No.: US17109480Application Date: 2020-12-02
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Publication No.: US20210080710A1Publication Date: 2021-03-18
- Inventor: James Jianguo Xu , Ken Kinsun Lee , Rusmin Kudinar , Ronny Soetarman , Hung Phi Nguyen , Zhen Hou
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Main IPC: G02B21/06
- IPC: G02B21/06 ; G02B21/00 ; G02B21/36
Abstract:
A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).
Public/Granted literature
- US11294161B2 3D microscope including insertable components to provide multiple imaging and measurement capabilities Public/Granted day:2022-04-05
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