Invention Application
- Patent Title: TANTALA RING RESONATOR AND METHOD FOR FABRICATING NONLINEAR PHOTONIC DEVICES
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Application No.: US16501134Application Date: 2020-07-10
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Publication No.: US20210055627A1Publication Date: 2021-02-25
- Inventor: Su-Peng Yu , Scott B. Papp , David Carlson , Kartik Srinivasan , Hojoog Jung
- Applicant: Su-Peng Yu , Scott B. Papp , David Carlson , Kartik Srinivasan , Hojoog Jung
- Applicant Address: US CO Boulder; US CO Boulder; US CO Boulder; US MD Rockville; KR Seoul
- Assignee: Su-Peng Yu,Scott B. Papp,David Carlson,Kartik Srinivasan,Hojoog Jung
- Current Assignee: Su-Peng Yu,Scott B. Papp,David Carlson,Kartik Srinivasan,Hojoog Jung
- Current Assignee Address: US CO Boulder; US CO Boulder; US CO Boulder; US MD Rockville; KR Seoul
- Main IPC: G02F1/35
- IPC: G02F1/35 ; G02F1/355 ; C23C14/34 ; C23C14/08 ; C23C14/58 ; G03F7/20

Abstract:
A tantala ring resonator includes a tantala ring resonator formed by ion-beam sputtering of tantalum pentoxide and exhibiting an optical quality factor in excess of 3×106, and a substrate to which the tantala ring resonator is attached. A method for fabricating nonlinear photonic devices includes depositing tantalum pentoxide with ion-beam sputtering to form a tantala layer onto a substrate, annealing the tantala layer, and etching the tantala layer to form a photonic device.
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