Invention Application
- Patent Title: LOW TEMPERATURE POLY-SILICON THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD OF PRODUCING THE SAME
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Application No.: US16308824Application Date: 2018-11-20
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Publication No.: US20200111818A1Publication Date: 2020-04-09
- Inventor: Chen CHEN
- Applicant: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Wuhan Hubei
- Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Wuhan Hubei
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@286125e1
- International Application: PCT/CN2018/116302 WO 20181120
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
The present disclosure proposes a method of producing an LTPS TFT array substrate. The method is about stacking of a gate insulating layer and an interlayer insulating layer for providing conditions for formation of a gate trench. In addition, stacking of the gate insulating layer and the interlayer insulating layer is produced with some blocks of forming a hole on the gate insulating layer and the interlayer insulating layer to form a hole pattern, filling the gate trench, and producing gate lines. In this way, the formation of the gate lines and the formation of the hole pattern on the gate insulating layer and the interlayer insulating layer are done using the same mask. The method of the present disclosure reduces the number of masks required compared with the method of the related art, thereby reducing the production costs.
Public/Granted literature
- US10714504B2 Low temperature poly-silicon thin film transistor array substrate and method of producing the same Public/Granted day:2020-07-14
Information query
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