- 专利标题: BONDING WIRE FOR SEMICONDUCTOR DEVICE
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申请号: US16576683申请日: 2019-09-19
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公开(公告)号: US20200013748A1公开(公告)日: 2020-01-09
- 发明人: Takashi YAMADA , Daizo ODA , Ryo OISHI , Tomohiro UNO
- 申请人: NIPPON MICROMETAL CORPORATION , NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; B23K35/02 ; B23K35/30 ; C22C9/04 ; C22C9/06
摘要:
There is provided a bonding wire for a semiconductor device including a coating layer having Pd as a main component on a surface of a Cu alloy core material and a skin alloy layer containing Au and Pd on a surface of the coating layer, the bonding wire further improving 2nd bondability on a Pd-plated lead frame and achieving excellent ball bondability even in a high-humidity heating condition. The bonding wire for a semiconductor device including the coating layer having Pd as a main component on the surface of the Cu alloy core material and the skin alloy layer containing Au and Pd on the surface of the coating layer has a Cu concentration of 1 to 10 at % at an outermost surface thereof and has the core material containing either or both of Pd and Pt in a total amount of 0.1 to 3.0% by mass, thereby achieving improvement in the 2nd bondability and excellent ball bondability in the high-humidity heating condition. Furthermore, a maximum concentration of Au in the skin alloy layer is preferably 15 at % to 75 at %.
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