• 专利标题: LEAK INSPECTION ASSISTANCE DEVICE AND LEAK INSPECTION METHOD USING SAME
  • 申请号: US16343368
    申请日: 2017-10-03
  • 公开(公告)号: US20190265122A1
    公开(公告)日: 2019-08-29
  • 发明人: Koji Kawasaki
  • 申请人: AIREX CO., LTD.
  • 优先权: JP2016223199 20161116
  • 国际申请: PCT/JP2017/035895 WO 20171003
  • 主分类号: G01M3/02
  • IPC分类号: G01M3/02 B01D46/44 B01D46/00 B01D46/46
LEAK INSPECTION ASSISTANCE DEVICE AND LEAK INSPECTION METHOD USING SAME
摘要:
Provided are a leak inspection assistance device and a leak inspection method using the same which enable using a normal leak inspection device in a leak inspection of filters in a clean room, have a small cost burden since a scanning robot, large-scape equipment, an incidental work, and the like are not required, and enable performing the accurate leak inspection with a small number of workers.A projection device which projects a suction point of a suction probe adjunct to a leak inspection device which performs a leak inspection onto a surface of a filter in a clean room in such a manner that the suction point moves in X-Y axis directions orthogonal to each other along the surface of the filter at a fixed interval and a fixed speed is provided, and a worker uses the suction probe for scanning in accordance with movement of the suction point.
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