- 专利标题: OXIDE SEMICONDUCTOR COMPOSITION, MANUFACTURING METHOD THEREOF, THIN FILM TRANSISTOR AND DISPLAY APPARATUS
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申请号: US16344000申请日: 2018-09-17
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公开(公告)号: US20190233299A1公开(公告)日: 2019-08-01
- 发明人: Wenlin ZHANG , Ce NING , Hehe HU , Zhengliang LI
- 申请人: BOE TECHNOLOGY GROUP CO., LTD.
- 申请人地址: CN Beijing
- 专利权人: BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人: BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人地址: CN Beijing
- 优先权: CN201810004209.3 20180103
- 国际申请: PCT/CN2018/105967 WO 20180917
- 主分类号: C01G15/00
- IPC分类号: C01G15/00 ; H01L29/786
摘要:
An oxide semiconductor composition for use in thin film transistors includes indium oxide, zinc oxide, and an oxide including a doping element of scandium, such as scandium oxide. A molar percentage of the indium oxide can be larger than approximately 50%. The oxide semiconductor composition can have a formula of In2Sc2ZnO7. Manufacturing of the oxide semiconductor composition can include: mixing indium oxide powder, scandium oxide powder, and zinc oxide powder to thereby obtain an oxide shaped object; and sintering the oxide shaped object to form the oxide semiconductor composition. A thin-film transistor for use in a semiconductor device, such as a display apparatus, can include the oxide semiconductor composition, and can thereby have improved mobility of the oxide semiconductor due to the reduced oxygen vacancy therein.
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